散斑相干法测量表面粗糙度时相干光夹角变化对测量的影响  

THE EFFECT OF THE CHANGE OF ANGLE BETWEEN TWO COHERENT BEAMS ON MEASUREMENT FOR MEASURING SURFACE ROUGHNESS WITH SPECKLE COHERENT METHOD

作　　者：王亚伟[1] 阎大鹏[2] 贺安之[2] 

机构地区：[1]江苏工学院 [2]南京华东工学院

出　　处：《应用光学》1993年第2期60-64,共5页Journal of Applied Optics

摘　　要：本文根据Leger激光散斑相干性理论,讨论测量表面粗糙度σ时两相干光束之间夹角的变化对测量精度和测量范围的影响,提出了合理选择夹角的理论依据,并从实验上得到了验证。The effect of the change of angle between two coherent beams on measuring accuracy and range for measuring the surface roughness is discussed according to Leger laser speckle coherent theory, a theoretical criterion of reasonably choosing the angle between two beams is given and verified experimentally.

关 键 词：测量 表面粗糙率 散斑法 相干性 

分 类 号：TH741.3[机械工程—光学工程]