准分子激光对不锈钢表面的掺杂淀积  

Laser implant-deposition of stainless steel by excimer laser irradition

作　　者：楼祺洪[1] 辜红平 高鸿奕[1] 魏运荣[1] 董景星[1] 丁爱臻[1] 

机构地区：[1]中国科学院上海光机所,201800

出　　处：《应用激光》1993年第3期97-99,共3页Applied Laser

摘　　要：对用XcCl准分子激光束照射BCl_3气体包围下的不锈钢材料表面特性变化作了研究。紫外激光能成功地将硼掺入金属表面,最高掺杂浓度可达30％。The process of doping and deposition of B atom into stainless steel by irradition of aXcCl excimer laser beam in a BCl_3 gas ambient is investigated, the exeperimental results show thatthe highest concentration of B atom in the surface layer exceeds 30 at. %.

关 键 词：准分子激光 不锈钢 掺杂淀积 

分 类 号：TG142.71[一般工业技术—材料科学与工程]