用α-RBS法检测球轴承滚道上润滑薄膜的组成与厚度  

Analysis of Composition and Thickness of Lubricating Films on the Races of Ball Bearing by the α-RBS Method

作　　者：孙晓军[1] 于德洋[1] 翁立军[1] 

机构地区：[1]中科院兰州化学物理研究所,兰州市城关区天水路342号730000

出　　处：《中国表面工程》1998年第3期41-44,共4页China Surface Engineering

基　　金：国家自然科学基金

摘　　要：利用串列粒子加速器，以能量为3.00MeV的α粒子（4He2+）束作探测束，用背散射法（RBS）检测了固体润滑球轴承经过运行实验后其滚道表面MoS2基共溅射薄膜的化学组成和厚度，考察了摩擦对它们的影响：结果表明：RBS技术能够无损地测得球轴承滚道表面薄膜的化学组成和厚度的定量结果，是球轴承检测及其摩擦学研究的一种可行方法。The analysis of composition and thickness is very important in study for ball bearing and space tribology. Especially in the research on application of solid lubication in space mechanism, the analytic methods must be required not to break the ball bearing, there fore some conceptional methods in surface analysis, such as AES, AEM, XPS and EPMA etc., can't be used as a quantitative method in measuring composition and thickness of thin solid films on the ball bearings. For this reason, using a serial particle accelerator and a specially made 3-dimensional rotating support for example, the composition and thickness of MoS2 based cosputtered film of the CZYS-619 ball bearing were analyzed by the α-RBS method with 3.00 MeV incident energy and 170 ±1° scattering angle, and the effects of friction on compositions and thickness of the film were also discussed in this paper. The results showed that the α -RBS method is feasib1e in study on ball bearings and tribology, and the MoS2 based cosputtered film is a good solid lubricating film for ball bearings when it is used in space mechanism.

关 键 词：球轴承 滚道 润滑 摩擦学 MOS2 背散射 表面 共溅射 厚度 薄膜 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TH133[机械工程—机械制造及自动化]