SnO＿2电热膜的老化和失效  

The Mechanism of Aging and Failure for SnO_2 Electrothermal Film

作　　者：刘柯林[1] 

机构地区：[1]东南大学电子工程系

出　　处：《电子器件》1994年第2期57-60,64,共5页Chinese Journal of Electron Devices

摘　　要：在几种不同的衬底上制作ＳｎＯ＿２电热膜，研究了它的电阻温度特性、老化特性和失效机理。指出膜层缺陷浓度的变化、内应力的均匀化以及膜层与衬底间可动离子的扩散，是产生ＳｎＯ＿２电热膜老化的主要原因。提出了改善电热膜老化的措施。电热膜的失效属于早期失效，设计电热膜时，合理分配膜承受的功率密度，制作过程中保证膜的均匀性，选择适当的衬底材质和几何形状，可避免这种早期失效。We prepared the SnO_2 electrothermal thin films on several kinks of substrates. Their resistancetemperature property , their mechanism of aging and lose-effectivenees had been studied.We found out that the change of the defect density in the film layer,the homogeneity of the internal stress distribution and the diffusion of the active moving-ions between the film layer and the substrate are the main sources to cause the aging of the SnO_2 electrothermal thin film,We carry out the measure to improve the tendency to the aging of our films.The lose-effectiveness of the electro thermal film is to a early stage lose-effectiveness,If we could share the loaded power-density reasonably,ensure the film with a fine distribution homogeneity and choose carefully suitable substrate material and geometry, that early stage lose-effectiveness could be avoided.

关 键 词：二氧化锡 电热膜 老化 失效 

分 类 号：O484.4[理学—固体物理] TN304.21[理学—物理]