微电极阵列若干电化学特性的研究  

Electrochemical Characteristics of Micro-electrode Array

作　　者：朱建中[1] 刘晓辉[1] 吴佳俐[1] 陆德仁[1] 林心如[1] 张国雄[1] 

机构地区：[1]中国科学院上海冶金研究所,上海200050

出　　处：《分析化学》1994年第1期6-9,共4页Chinese Journal of Analytical Chemistry

基　　金：国家自然科学基金资助课题

摘　　要：用微电子平面工艺制备了带宽相边长分别为10、20、30μm的带形和正方形微电极阵列(BMEA和SMEA)。在K_3Fe(CN)_6溶液中研究了它们的电化学特性。边长为10μm的SMEA(工作电极总面积仅为9×10^(-3)mm^2)有最大的电流密度(12.1μA/mm^2)和最短的响应时间(5s)。同一硅片中任选5个SMEA其H_2O_2工作曲线的线性范围为0.1～5mmol/L,平均斜率为220nA/mmol/L,斜率的相对标准偏差为16.1％。这些特性可能使它成为生物传感器的重要基础元件。Band- and square-type micro-electrode array (BMEA and SMEA) with 10,20 and 30 μm in band width and side length have been fabricated by standard planar processing, respectively and their electrochemical characteristics have been studied in K3Fe(CN)6 solution. SMEA with 10 μm in side length (the total area of the working electrode is 9X10^3mm2) exhibits the largest current density of 12. 1 μA/mm2 and the shortest response time of 5 s. The calibration curves of II2O2 for arbitrary five SMEA of a wafer show linear range of 0. 1~5. 0 mmol/L, mean slope of 220 nA/mmol/L and its relative standard deviation of 16. 1%. The characteristics potentially have become important basis for biosensors.

关 键 词：微电极阵列 电化学 铁氰化钾 

分 类 号：O646.54[理学—物理化学]