硅粉氮化新工艺中的定量研究  

QUANTITATIVE STUDY OF NEW TECHNOLOGY IN NITRIDING OF SILICON

作　　者：马长英[1] 葛昌纯[1] 夏元洛 陈利民 

机构地区：[1]北京科技大学

出　　处：《钢铁研究学报》1994年第2期35-39,共5页Journal of Iron and Steel Research

摘　　要：研究了几种氮化气氛对硅粉氮化产物的影响，用“归－化”处理的简单方法进行了Ｘ射线定量分析。分析结果表明，硅粉在氨气或氮、氢混合气气氛中，经两个阶段氮化能够较完全地转化为α－Ｓｉ＿３Ｎ＿４占主导地位的氮化硅粉末，而氮化时间相对于硅氮结合法较短。In this paper the effect of nitriding atmospheres on nitriding of silicon was studied.X-ray diffraction method was used to determine the quantities of phas- es in nitrided samples.The result shows that silicon can be changed completely into silicon nitrides in which α-Si_3N_4 is major in ammonia or mixture of nitrogen and hy- drogen. The time for complete nitriding in these two atmospheres is much shorter than that in the method using nitrogen only.

关 键 词：氮化硅粉末 相分析 氮化法 

分 类 号：TF123.34[冶金工程—粉末冶金]