表面粗糙度测量的磁光位相调制和锁相干涉  

Phase Modulation and Phase-Locked Interference of the Instrument for Measuring Surface Roughness

作　　者：徐文东[1] 李锡善[1] 

机构地区：[1]中国科学院上海光学精密机械研究所

出　　处：《光学学报》1994年第12期1303-1307,共5页Acta Optica Sinica

摘　　要：提出了一种表面粗糙度测量的新方法．该方法采用了微分偏振干涉的原理，利用由法拉第磁光调制器所组成的调制系统对偏振干涉光路的位相进行调制，利用锁相干涉原理对位相进行探测．该方法可实现无参考面快速非接触测量，在普通实验条件下，也可保持良好的稳定性．实验装置即可给出表面的轮廓又可给出其它统计数据，其横向分辨率为１．２μｍ，纵向为２ｎｍ．This paper introduces a new interferometer for measuring the surface roughness based on the principle of differential polarization interferometry. A Faraday modulating system is used to modulate the phase between two interference light beams and the phase is detected by phase-locked interference. It has excellent stability even under normal condition, and rapid and nocontact measurement can be done without a special reference surface. The instrument can produce the surface profile and statistical data with height sensitivity 2 nm and lateral resolution 1. 2 μm.

关 键 词：微分偏振干涉 法拉第调制系统 锁相干涉 粗糙度 

分 类 号：TG84[金属学及工艺—公差测量技术] O436.1[机械工程—光学工程]