空间分辨光谱测量研究准分子激光对Al表面的烧蚀  

Spatial-Resolved Spectral Measurements Study on Excimer Laser Ablation of Al Surface

作　　者：张抗战 方尔梯[1] 黄正宇[1] 张谊华[1] 滕玉美[1] 曾宪康[1] 

机构地区：[1]华东理工大学化学物理研究室

出　　处：《华东理工大学学报（自然科学版）》1994年第5期668-672,共5页Journal of East China University of Science and Technology

基　　金：国家白然科学基金

摘　　要：采用空间分辩光谱测量技术，研究了３０８ｎｍ紫外激光烧蚀Ａ１表面发射粒子的动力学过程。通过测量溅射粒子发射光谱中Ａ１（Ⅰ）３９６．１和Ａ１（Ⅱ）２８１．７ｎｍ线强度的空间分布，以及激光能量密度和不同烧蚀环境压力对它们的发射强度空间分布的影响，讨论了紫外３０８ｎｍ激光溅射Ａ１表面发射粒子的微观过程。认为Ａ１原子和Ａ１离子的激发机理不完全相同，它们除被等离子体中的高能电子碰撞激发外，Ａ１离子和电子的复合，也是引起Ａ１原子激发的一个重要通道。Spatial-resolved spectral measurement technique was used to study the dy-namics of excimer laser ablation of A1 surface. Laser fluence and ablation atomsphere pres-sure dependence of the spatial intensity distributions of A1(Ⅰ)396.1nm and A1(Ⅱ)281.7nm lines were studied.Based on the results,the microscopic mechanism of excimer laser ablation of A1 surface is discussed and it is assumed that the excited A1 atoms and A1 ions may be pro-duced from different mechanism.Besides the collision excitation by the electrons with high energy,the recombination of the electrons and ions is also a main channel of producing the excited atoms.

关 键 词：激光 烧蚀 铝 空间分辨光谱 

分 类 号：TN405[电子电信—微电子学与固体电子学]