准外差干涉计量算法分析及应用  

Algorithm Analysis of Quasi-heterodyne Interferometry and Its Applications

作　　者：郑文[1] 

机构地区：[1]广州大学维修工程技术学部

出　　处：《计量学报》1994年第3期226-231,共6页Acta Metrologica Sinica

摘　　要：采用最小二乘方法，在更一般的意义下推导了准外差干涉计量的相位计算公式，提出了测量误差与采样方式、采样次数、信噪比及相位漂移的关系，提出了相位算法选择的基本依据。建立了准外差全息干涉计量系统，能对条纹图进行全场、高精度、全自动的定量分析；将其应用于实际物体变形的测量之中，给出了实验结果。A phase calculating equation in quasi-heterodyne interferometry is derived under general conditions with the least square method. The relationships of measurement errors with the sampling method, the sampling number, the signal to noise ratio and the phase drift are presented. The basis for selecting the phase algorithm is provided. We set up a measuring system of quasi-heterodyne holographic interferometry, which can perform the whole-field, high accurate and full-automatic quantitative analysis to the fringe patterns. It has been applied to the deformation measurement of practical objects. Experimental results are also given.

关 键 词：干涉计量 准外差 相位 算法 

分 类 号：TH744.301[机械工程—光学工程]