区熔单晶硅生产操作指导专家系统  

Study on Floating Zone Silicon Operation Guided Expert System

作　　者：郑德玲[1] 李燕杰[1] 李育苗[1] 

机构地区：[1]北京科技大学自动化系

出　　处：《控制与决策》1994年第1期64-69,共6页Control and Decision

基　　金：国家教委霍英东基金

摘　　要：本文介绍区熔单晶硅生产操作指导专家系统。首先，系统实现了连续图象的自动变周期、定瞬间采样，并提出一种新的区域扩张增量图象处理算法．其次，叙述了知识的获取过程及类规则，提出分布的多库结构，并实现了不确定性推理．最后，开发了区熔单晶硅生产操作指导专家系统，实现了从数据和图象采集、处理、事实获取、推理到给出操作指导一体化。This paper introduces a floating zone monocrystalline silicon operation guided expert systesm.First, in the system the automatically changing sampling cycle and the automatic deciding snap instantaneity of succesive image have come to practice. A new image processing algorithm by gradually expanding area is proposed. Secondly, the process of acquiring and representing knowledge by rules is described, and a distributed multi-knowledge base structure is presented. And the uncertainty reasoning is realized. Finally,according to the reality of our country the real-time floating zone silicon operation guided expert system is built up. The automation ranging from data and image collection, processing and facts acquisition to the instruction of operation is realized.

关 键 词：单晶硅 专家系统 图象处理 

分 类 号：TN304.120[电子电信—物理电子学]