平行平板微型槽间气体的滑移流动  

Gaseous Slip Flow in Parallel Plates MicroChannel

作　　者：韦学勇[1] 卢德江[1] 蒋庄德[1] 

机构地区：[1]西安交通大学精密工程研究所机械制造系统工程国家重点实验室,西安710049

出　　处：《微纳电子技术》2005年第3期129-132,共4页Micronanoelectronic Technology

基　　金：国家自然科学基金青年科学基金资助项目(50205020)

摘　　要：对平行平板微型槽中气体滑移流动的压强分布特性进行了研究。将压强和气体平均分子自由程的关系引入到一阶速度滑移边界条件中,求解Navier-Stokes方程,得到了显式的压强分布表达式。模拟计算结果表明,平行平板间滑移流动的气体压强分布曲线是上凸的下降抛物曲线。在边界滑移条件下,分析了平行平板微型槽在应用中由于微型槽中压力分布变化形成的气体阻尼问题,分析结果表明无滑移边界条件在微尺度流动分析中不再适用。In this paper, pressure distribution of gaseous slip flow in parallel plates microchannel was studied. The relation between pressure and gas modular mean free path was introduced into one order velocity slip boundary condition. And then explicit expression of pressure distribution was obtained through solving Navier-Stokes Equation. Computational results showed that pressure distribution curve in parallel plates microchannel was convex decreasing parabolic curve. Based on slip boundary condition, gas damping caused by changes of pressure distribution along the microchannel was studied in the application of parallel plates microchannel. Computing results showed that traditional non-ship boundary condition was no longer applicable in micro flow analysis.

关 键 词：滑移流动 平均自由程 压强分布 气体阻尼 

分 类 号：O351.3[理学—流体力学] TB126[理学—力学]