光学投影式检测非球面器件的模拟计算  

Simulation calculation of measuring optical aspheric surface based on light pattern projection

作　　者：段存丽[1] 田爱玲[1] 陈芳[1] 

机构地区：[1]西安工业学院光电科学与工程学院

出　　处：《光学仪器》2005年第1期47-51,共5页Optical Instruments

基　　金：陕西省科技厅基金项目(03JK170)

摘　　要：针对光学投影式检测非球面器件过程进行模拟,利用光学的基本理论和数学公式推导,对非球面度的检测过程进行了理论分析及精密计算,并对理论分析的结果进行了计算模拟,模拟得到的非球面度能较好地与理论结果相符合,模拟的精度达到了0.1nm。Simulation calculation of measuring optical aspheric surface based on light pattern projection is introduced. The measure of asphericity is analysed and calculated by basic theory of optical and calculation of math formula.The result of theory analysis is simulated on computer.The precision of simulation achieves to 0.1nm.The simulation calculation result has a good according with theory calculation.

关 键 词：光学检测 非球面器件 理论计算 模拟计算 

分 类 号：TN2[电子电信—物理电子学]