PMN-PZT多层厚膜微致动器的制作与分析  

FABRICATION AND ANALYSIS OFPMN-PZT MULTILAYER THICK-FILMMICRO-ACTUATOR

作　　者：荆阳[1] 雒建斌[1] 路新春[1] 张力[1] 

机构地区：[1]清华大学摩擦学国家重点实验室,北京100084

出　　处：《机械工程学报》2005年第3期107-111,共5页Journal of Mechanical Engineering

基　　金：国家973计划(2003CB716200)国家自然科学基金(90206022)资助项目

摘　　要：研制了一种用于计算机磁头精确定位的'U'形压电微致动器。该致动器由流延法在不锈钢(SUS304)基体上制备镁铌酸铅一锆钛酸铅(PMN-PZT)多层膜,并由丝网印刷工艺制作Ag／Pd内电极。在此基础上,在多普勒干涉仪(LDV)上对封装了压电元件的'U'形微致动器进行了测试。结果表明,该致动器具有优异的位移／电压灵敏度、谐振频率等特点。此外,有限元仿真进一步验证了多层结构的压电元件可以有效地提高压电微致动器的驱动能力。A new 'U'-type piezoelectric micro-actuator with two lead magnesium niobate-lead zirconate titanate Piezoelectric (PMN-PZT) multilayer elements bonded to a stainless steel(SUS304) substrate for positioning a magnetic head for high-density hard disk devices has been fabricated and analyzed. This PMN-PZT micro-actuator is made using a tape-casting technique to deposit PMN-PZT thick-films and applying screen-printing processes to fabricate Ag/Pd electrodes. After that, an U-type micro-actuator attached to each side via piezoelectric elements is also practically measured by laser Doppler vibrometer in order to testify the driving mechanics of it. The highest displacement/voltage sensitivity and corresponding resonance frequency are achieved by the micro-actuator. This micro-actuator is also simulated by finite element method. The results reveal that the piezoelectric element with multi-layer structure is particularly effective in increasing the driving capacity of the piezoelectric micro-actuator.

关 键 词：镁铌酸铅 锆钛酸铅 多层膜元件 “U”形微致动器 双级伺服系统 

分 类 号：TH7[机械工程—仪器科学与技术] TN4[机械工程—精密仪器及机械]