等离子浸没离子注入合成TiN/Ti-O梯度薄膜的成分与力学性能  

COMPOSITION AND MECHANICAL PROPERTIES OF TiN/Ti-O GRADIENT FILMS PREPARED BY PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION

作　　者：文峰[1] 黄楠[1] 孙鸿[1] 万国江[1] 

机构地区：[1]西南交通大学材料科学与工程学院,成都610031

出　　处：《机械工程学报》2005年第3期155-159,共5页Journal of Mechanical Engineering

基　　金：国家973资助项目(G1999064705)

摘　　要：用等离子浸没离子注入和沉积(PⅢ-D)的方法,采用三种工艺分别在Si、Ti6Al4V和热解碳(LTIC)表面合成了TiN／Ti-O梯度薄膜。用可编程逻辑控制器(PLC)为核心的一套控制系统控制金属源阴极的推进和气体成分的改变。使用纳米压痕仪、针盘式摩擦磨损试验机和结合力测试仪分析了梯度薄膜的力学性能,梯度薄膜硬度最高可达19.5 GPa,薄膜结合力可达到68 N左右。采用X射线衍射(XRD)分析表明,表层的薄膜为具有金红石结构的氧化钛,二次离子质谱(SIMS)对薄膜进行了定性分析,证实薄膜具有梯度特性。采用X射线光电子能谱(XPS)对梯度薄膜进行近表面成分分析,结果表明合成的TiN／Ti-O薄膜是非化学计量的,其成分组成为TiO2、Ti2O3和TiO。使用扫描电镜(SEM)观察了薄膜磨痕、结合力划痕,结果表明,控制合成的TiN／Ti-O梯度薄膜具有良好的力学性能。Titanium oxide titanium nitrogen gradient films are prepared on Si, Ti6Al4V and low temperature isotropic car bon(LTIC) by plasma immersion ion implantation and deposition (PⅢ-D) under three different processes. The pushing of the metal cathode source and the variation of gas composition are controlled by programmable logical control (PLC). The mechanical properties of the synthesized films are investigated by nano-indentation tests, pin-on-disc wear experiments, and scratch test. The results show that maximum hardness of the gradient films achieves 19.5 GPa, and the maximum adhesion between films and substrate is 68 N or so. Structure investigation results show that the surface Ti-O layer of the films is rutile structure. The gradient characteristics of the films are supported by qualitative analysis of second ion mass spectroscopy (SIMS). X-ray photoelectron spectra (XPS) analyses the surface of synthesized films. The results of XPS show that synthesized films are non-stoichiometric, whose composition are identified as TiO2, Ti2O3 and TiO. Scanning electron microscope (SEM) is used to observed wear trace and scratch trace of the TiN/Ti-O gradient films. The results show that the films have good wear resistance and high adhesion strength.

关 键 词：等离子浸没离子注入(PⅢ) X射线光电子能谱(XPS) TiN/Ti-O梯度薄膜 

分 类 号：TQ02[化学工程] TB302.3[一般工业技术—材料科学与工程]