用线性调频半导体激光实现位移的非接触精密测量  

Non-Contact Precision Measurement for Displacement by the Linear Frequency Modulation Semiconductor Laser

作　　者：赵念念[1] 刘君[1] 李信[1] 张宇平 郭彦珍[1] 

机构地区：[1]西安理工大学精密仪器工程系

出　　处：《西安理工大学学报》1994年第2期90-94,共5页Journal of Xi'an University of Technology

摘　　要：提出一种应用半导体激光器的调频特性实现非接触测量的方法，可应用于小位移精密测量，也可应用于可转化为小位移的形状的精密测量。对于软材料的测量有重要意义，为了克服半导体激光波长变化、空气温度、气压、湿度及空气成份变化对测量稳定性的影响，设计了一种差动光学系统，满意地解决了这个问题，使测量方法达到了实用化。Semiconductor laser has great advantage in measurement for its small volume, big power andgood modulation property. This Paper deals with non-contact measurement method by its frequencymodulation characteristics. It is used not only in ting-displacement Precision measurement but also inthe shape which can be changed into ting-displacement. It has a great significance on the measurementof the soft materials. The differential optical system designed in this paper overcomes the influence onmeasuring steadiness and the variations in wavelength of semiconductor laser, air temperature, barometric Pressure, humidity and air comPOnent. The Problem is successfully settled and the measurementmethod is made up to practicable.

关 键 词：半导体激光 非接触 精密测量 

分 类 号：TH744.5[机械工程—光学工程]