改普通电机为气浮电机的研究  

A study of the changing from the normal motor into air-bearing motor

作　　者：张景和[1] 谷志强[1] 王海峰[1] 张顺国[1] 龙剑[1] 任子书[1] 

机构地区：[1]哈尔滨工业大学,哈尔滨150001

出　　处：《机械设计与制造》2005年第3期67-68,共2页Machinery Design & Manufacture

摘　　要：介绍了超精密加工中主轴电机的振动及其对超精密加工的影响;在原有伺服电机的基础上设计并制作了气浮电机;用加速度传感器提取电机的振动信号,并用AD3525FFT频谱分析仪对电机的振动加速度信号进行了分析,测试出在电机转速为500r/min时普通伺服主轴电机和气浮主轴电机的振动和速度分别为0.436×10-4g和0.108×10-4g,用改造的气浮主轴伺服电机构成的超精密加工系统,加工KDP晶体的表面粗糙度达到了8nm。本项研究对提高超精密加工主轴系统精度具有一定的实用价值。Introduce the motor's vibration and the vibration's influence upon the accuracy of the ultra precision process.Based on the original servo motor,design and make an air-bearing motor.Extracted the motor's vibration signals by using acceleration sensors,and analyze the acceleration signals by using AD3525 FFT analyzer,the result showed that when the motor speed is 500r/min,the vibration acceleration is 0436×10-4g when use the normal servo motor,the vibration acceleration is 0.108×10-4g when use the air-bearing motor.Machiniang KDP crystals by using the ultra precision processing system with air-bearing motor,the rouqnness of the kdp crystals can be less than 8nm. This research shows practical value to improve the accuracy of the ultra precision processing systsem.

关 键 词：电机 气浮电机 振动 超精密加工 

分 类 号：TM3[电气工程—电机]