白光干涉谱数据处理的新方法  

Novel method for processing data of white light interference spectrum

作　　者：张秀达[1] 严惠民[1] 杜艳丽[1] 聂永军[1] 施柏煊[1] 

机构地区：[1]浙江大学光电工程系国家光学仪器重点实验室,国家光学仪器工程技术研究中心,浙江杭州310027

出　　处：《光电工程》2005年第3期93-96,共4页Opto-Electronic Engineering

基　　金：国家高科技 863 资助项目

摘　　要：提出了一种基于动态均值滤波、二次曲线法解调和拟合法求光程差的数据处理新方法。与传统的算法比较,动态均值滤波避免了耗时的快速傅立叶变换,二次曲线法解调有更好的解调精度,拟合法求光程差可去除噪音较大的数据。新算法有快速、可使用的测量范围大和抗干扰能力强的优点。新方法可适用的白光干涉谱数据距离范围为 10μm 到 100μm。在样品上采集到的白光干涉谱数据的对比度约为 0.06、信噪比约为 18dB。用新方法和传统方法分别对这些数据进行了处理。新方法处理结果的短期数据方差小于 10nm,精度比常用方法好 4 倍。A novel data processing method based on dynamic linear smooth, conic demodulation and measuring optical path difference by means of fitting is proposed. Compared with traditional algorithm, dynamic linear smooth needn't perform time-consuming fast Fourier transform and conic demodulation has better demodulation accuracy. The measurement of optical path difference by fitting can eliminate the data with large noises. The new algorithm has the advantages of fast speed, large measurement range and large anti-interference capability. The method is suitable for the measurement of white light interference spectrum in the range 10-100 μm. The contrast and SNR of the white light interference spectrum data acquired on the sample are about 0.06 and 18 dB, respectively. These data are processed by the proposed method and traditional method, respectively. Experimental results show that the short-term standard data deviation obtained by the proposed method is less than 10 nm and its accuracy is 4 times better than that of traditional method.

关 键 词：白光干涉术 干涉谱 距离测量 信噪比 数据处理 

分 类 号：TN247[电子电信—物理电子学]