DF强激光反射镜热畸变的检测及热吸收的有限元分析  

Thermal Distortion Measurements and Absorption Analysis byFinite Element Method of High Power DF Laser Reflectors

作　　者：齐文宗[1] 黄伟[1] 张彬[1] 蔡邦维[1] 刘志国[2] 

机构地区：[1]四川大学电子信息学院,四川成都610064 [2]中国科学院光电技术研究所,四川成都610209

出　　处：《中国激光》2005年第3期379-383,共5页Chinese Journal of Lasers

摘　　要：以功率约为30 kW,中心波长为3 8μm,出光时间为1 s的连续DF化学激光器作为抽运源,在抽运光共轴近正入射于圆形反射镜条件下,利用夏克哈特曼(Shack-Hartmann)波前传感器,对不同工艺条件下镀制的3 8/0 633μm双波段多层膜强激光反射镜的热畸变量进行了检测.基于热传导方程和热弹方程,在考虑到空气折射率热效应基础上,利用有限元分析方法,完成了对不同反射镜热吸收的评价.结果表明,在目前最好的工艺参数控制条件下,所镀制的反射镜的热吸收率接近于80×10-6.从而在膜层材料及膜系设计结构均完全相同的前提下,达到了评价及优化膜系镀制工艺的目的.Irradiated by a continuous wave (CW) DF laser with power of ∼30 kW, wavelength of 3.8 μm, and irradiation time of 1 s, under the conditions of the laser beam approximately perpendicular to the coaxially rounded reflector, the thermal distortions of 3.8/0.633 μm dual-wavebands multi-layer high-power laser reflectors manufactured by different crafts are tested by a Shack-Hartmann wave-front sensor. Based on the thermal conduction equations and thermal-elastic equations, taken account of the thermal effect of the refractivity of the air, a finite element method is used to estimate the thermal absorptions of the reflectors. The results indicate that the lowest thermal absorbability of the reflectors manufactured with best crafts is approached to 80 × 10-6. On account of the materials and the structure designs of the coatings being all complete the same, the purpose of the film-plating parameters estimate and/or evaluating is realized.

关 键 词：薄膜 热吸收 有限元分析 

分 类 号：O484.5[理学—固体物理] O343.6[理学—物理]