Ta_2O_5/SiO_2硬膜双腔滤光片激光损伤特性研究  

Laser-Induced Damage of Ta_2O_5/SiO_2 Two-CavityNarrow-Band Interference Filters

作　　者：高卫东[1] 黄建兵[1] 徐学科[1] 赵元安[1] 邵建达[1] 范正修[1] 

机构地区：[1]中国科学院上海光学精密机械研究所薄膜中心,上海201800

出　　处：《中国激光》2005年第3期384-388,共5页Chinese Journal of Lasers

摘　　要：研究了Ta2O5/SiO2 硬膜双腔干涉滤光片带内、带边及带外的吸收和激光损伤特性.实验发现,对于作用激光,带通滤光片的驻波场分布、吸收率和损伤阈值在带内、带边和带外的响应特性对作用激光波长均呈现出明显的选择性.根据实验结果,结合滤光片的驻波场分析,给出了带通滤光片的损伤机理.The laser-induce damage threshold (LIDT) of Ta2O5/SiO2 two-cavity narrow-band interference filters with different central wavelength was investigated with a Nd:YAG laser at 1064 nm under single-pulse mode, and the absorption measurement of such coatings was also performed by surface thermal lensing (STL) technique. It is found that the narrow-band interference filters show different laser-induced damage behavior in the different zone (interband, band edge and rejection zone) of such coatings under high power laser irradiation. Using the electric distribution theoretical calculating, the experimental results have been analyzed in detail. The laser-induced damage behaviors of such filters are in agreement with theoretical prediction.

关 键 词：薄膜 损伤阈值 干涉滤光片 弱吸收 激光损伤机理 

分 类 号：O484.5[理学—固体物理]