磁性薄膜微电感器件的研究进展  

Development of the Magnetic Thin Film Microinductor

作　　者：高孝裕[1] 陈吉安[1] 周勇[1] 雷冲[1] 王明军[1] 张亚民[1] 周志敏[1] 毛海平[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院薄膜与微细技术教育部重点实验室,上海200030

出　　处：《电子元件与材料》2005年第4期68-71,共4页Electronic Components And Materials

基　　金：国家自然科学基金资助项目(50275096);上海市纳米专项(0215nm104;0352nm014)

摘　　要：综述了磁性薄膜微电感的研究现状,介绍了四种不同电感器件的结构设计(平面螺旋型,磁芯螺线管,曲折结构及夹心条状结构)及其优缺点和磁芯材料(坡莫合金,铁氧体,非晶,纳米晶软磁)对电感器件的影响。Reviewed was the current status of the magnetic thin film microinductors. Four kinds of different microinductors, including their structure designs, merits and drawbacks were introduced. According to different design requirements and their applications, various core materials are selected to use in the fabrication of the microinductor. The effects of the core materials on microinductor are also discussed.

关 键 词：电子技术 磁性薄膜 综述 微电感 结构设计 磁芯材料 电感量 品质因子 

分 类 号：TM55[电气工程—电器]