基于多功能加工平台的微细电解加工(英文)  

Electrochemical Micromachining Based on Multifunction Machine Tool

作　　者：李小海[1] 赵万生[2] 王振龙[1] 李志勇[1] 张勇[1] 

机构地区：[1]哈尔滨工业大学机电学院,哈尔滨150001 [2]上海交通大学机械与动力工程学院,上海200030

出　　处：《纳米技术与精密工程》2005年第1期29-35,共7页Nanotechnology and Precision Engineering

摘　　要：电解加工在加工过程中因难以控制加工形状而很少应用在微细加工领域.为了对微细电解加工可行性进行探索,设计了多功能微细加工平台.利用多功能微细加工平台可为微细电解加工在线制作电极,采用低加工电压、低浓度的钝化电解液、高频窄脉冲电源和高速旋转的微细电极,进行了微细电解加工实验,取得了很好的工艺效果.加工间隙是影响加工精度的关键因素,设计了一个加工间隙控制伺服系统,以保证微小的加工间隙.在厚为100μm的不锈钢薄片上用微细电解打孔加工出直径为65μm的微小孔.利用微细电解加工时电极无损耗,提出采用简单圆柱微细电极进行微细电解铣削,加工出较高精度的微结构,取得了较好的工艺效果,从而验证了该微细电解加工装置的微细加工能力和方法的可行性.Electrochemical machining (ECM) has been rarely applied in micromachining because of the difficulty in controlling machined shape. This research work aims to develop an experimental equipment to carry out in depth research on micro electrochemical machining (micro-ECM) and explore the feasibility of applying ECM to micromachining. Lower machining voltage, lower passivity electrolyte concentration, high frequency short pulse power supply and micro rotating tool electrode at high speed have been synthetically used to localize the dissolution area during ECM, thus the machining gap can be kept at a very small value, and the better resolution of machined shape is achieved by using a novel designed electrode gap control system and the effective utilization of ECM for micromachining is fulfilled. Micro tool electrodes can also be fabricated by micro electro discharge machining (EDM) on the same machine tool. The experiments on micro-hole drilling and microstructure milling by micro-ECM on stainless steel plate are conducted. At different sound parametric combinations, micro hole with 65 μm diameter drilled on the stainless steel plate with 100 μm thickness and the micro structure milled on 304 stainless steel foil with 300 μm thickness with high precision are achieved. The satisfactory experimental results show the potential capability of the equipment for higher machining accuracy of micro feature and feasibility of process.

关 键 词：电解加工 加工间隙 微细电极 微细加工 微小孔 铣削 孔加工 不锈钢薄片 无损 窄脉冲 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]