基于MAX1457的加速度硅微传感器的信号处理  

Signal process of the micro array accelerometer based on MAX1457

作　　者：刘丹[1] 刘晓明[1] 

机构地区：[1]电子科技大学机械工程学院,四川成都610054

出　　处：《中国测试技术》2005年第2期115-117,123,共4页CHINA MEASUREMENT & TESTING TECHNOLOGY

基　　金："十五"军事预研项目 (18 8 1 2 )

摘　　要：测高g值的加速度硅微传感器[4] 采用单晶硅材料制成,直接输出信号小,存在严重的温度误差。采用MAX14 5 7专用传感器信号处理器,它可以补偿传感器的温度误差和非线性误差。本文分析了MAX14 5 7的工作原理,设计了获得补偿参数的系统。The work principle and application of real-time self-compensation of MAX1457 is introduced in this paper,which is choosed to process the signal of the silicon micro array accelerometer.It can compensate temperature errors and non-linearity of the sensor.Firstly, the step of compensation is introduced by lots of equations gradually.Secondly,the device designed to achieve the compensation parameters is showed.Finally,one CMOS or gate is choosed to manage the signals of eight array accelerometers on the same chip.

关 键 词：测高g值的加速度硅微传感器 温度补偿 MAX1457 或门 信号处理 

分 类 号：TP39[自动化与计算机技术—计算机应用技术]