双频激光三尺组合法直线度测量系统  

A Double-Frequency Straightness Measurement System of Three Straightedge Pairs

作　　者：张善钟[1] 赵辉[1] 浦昭邦[1] 武晋燮 

机构地区：[1]哈尔滨工业大学

出　　处：《仪器仪表学报》1994年第2期133-137,共5页Chinese Journal of Scientific Instrument

摘　　要：本文提出一种双频激光三尺组合法直线度测量系统。理论分析及实验结果都说明本系统可望获得优于0.1μm/m的精度,是提高现有直线度测量精度的一个较实用的方法。The double- frequency straightnees measurement system of three straightedge pairs is put forward here. Theoretical analysis and experimental results show that the accuracy of the system is better than 0. lum/m. It is one of the practical ways of improving straightness measurement accuracy.

关 键 词：激光三尺组合 直线度测量 测量系统 

分 类 号：TG83[金属学及工艺—公差测量技术]