紫外激光烧蚀金属Al靶诱导等离子体的发射光谱研究  

Optical Spectra Studies on Laser-Ablated Plasma Emission of Metal Al

作　　者：曾宪康[1] 方尔梯[1] 张谊华[1] 张抗战 黄正宇[1] 滕玉美[1] 

机构地区：[1]华东理工大学化学物理研究室

出　　处：《应用激光》1994年第2期55-58,共4页Applied Laser

基　　金：国家自然科学基金

摘　　要：通过测定紫外激光烧蚀Ａｌ靶诱导等离子体的发射光谱，研究了激光烧蚀Ａｌ靶的溅射过程和烧蚀环境气体对发射光谱强度的影响，提出电子碰撞激发模型，定性解释了烧蚀环境气体对等离子体发射光谱的增强效应。Measurements of optical emission from the ablation plume of metal Al by XeClexcimer laser are reported.The effects of the surrounding atmosphere pressure(argon,and helium)over the range 13.3Pa to 101.3kPa on optical emission was studied. The results are qualitatively explained using a simple model based on optical emission arising from inelastic collision between the elemental species and electron with high.kinetic energy.

关 键 词：紫外激光 激光烧蚀 发射光谱 铝 

分 类 号：O562.3[理学—原子与分子物理]