[(BaTiO_3)_m/(SrTiO_3)_m]_n超晶格生长的RHEED实时研究  

Realtime Study of the Growth of[(BaTiO_3)_m/(SrTiO_3)_m]_n Superlattices Film with RHEED

作　　者：魏雄邦[1] 姜斌[1] 李燕[1] 邓宏[1] 蒋书文[1] 张鹰[1] 姚海军[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《压电与声光》2005年第2期178-181,共4页Piezoelectrics & Acoustooptics

摘　　要：利用反射高能电子衍射(RHEED),研究了在SrTiO3(100)基片上采用激光分子束外延法生长的[(Ba-TiO3)m/(SrTiO3)m]n超晶格薄膜的生长特性。观察到清晰明亮的反射高能电子衍射花样及富有周期性的RHEED振荡曲线,制备的超晶格呈现良好的结晶层状外延生长,薄膜表面及界面的平整度很好。BaTiO_3)_m/(SrTiO_3)_m]_n superlattices film were grown on SrTiO_3 (100) substrate by laser molecular beam epitaxy(L-MBE) and the growth of which was studied with RHEED. The pattern and the intensity oscillations of RHEED show a layer-by-layer growth mode and good crystalline structure. The results also show that the interfaces and the surface of the superlattices film are very smooth.

关 键 词：反射高能电子衍射(RHEED) 超晶格 外延生长 

分 类 号：TN1[电子电信—物理电子学]