基于时间差法主动调焦式激光测头的研究  

A Study of Dynamic Confocal Laser Probe based on Time Difference Measurement

作　　者：樊玉铭[1] 张国雄[1] 高翔[1] 李智[1] 赵树忠[1] 

机构地区：[1]天津大学精密测试技术与仪器国家重点实验室,天津300072

出　　处：《中国激光》2005年第4期514-518,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金(50075064)资助项目。

摘　　要：在研究动态主动调焦法测量原理的基础上,提出一种新型的动态主动调焦式激光测头的检测方法。该检测方法的核心原理是将位移量的测量转换成了时间差的测量,从而简化了激光测头的结构,提高了激光测头的测量精度和稳定性。介绍了所设计的高精度激光测头测量系统,并对激光测头进行了动态特性的实验。结果表明激光测头的测量分辨力为0 .075μm,测量线性度为0. 45μm,测量范围为±0 .1 mm。Based on a study optical dynamic active co nf ocal probe, a new method of the measuring deviation focus is developed. The key point of this new method is that displacement of the turning fork is converted t o time difference measurement, thus the optical and mechanical structures of the laser probe system can be simplified greatly, and its accuracy and stabilit y are enhanced. A new high integration measurement system is designed, and syste matic experiments resulted of the including linearity, measuring range and perfo rmance were carried out.

关 键 词：测量 激光测头 动态主动调焦 时间差调焦测量 

分 类 号：TS736.2[轻工技术与工程—制浆造纸工程] TN247[电子电信—物理电子学]