一种测量超微粒子表面氧化层厚度的新方法  

A NEW METHOD TO MEASURE THE THICKNESS OF SURFACE OXIDE LAYER OF ULTRAFINE PARTICLES

作　　者：陈健[1] 孙秀魁[1] 陈文绣[1] 杨明川[1] 胡壮麒[1] 魏文铎[1] 

机构地区：[1]中国科学院金属研究所快速凝固非平衡合金国家重点实验室,沈阳110015

出　　处：《真空科学与技术》1994年第2期103-106,共4页Vacuum Science and Technology

摘　　要：通过XPS分析与Ar^+刻蚀相结合的方法，测量了Fe_(50)Pd_(50)合金超微粒子（UFP）的表面氧化层厚度，发现它的表面氧化层为1．4um厚，小于电镜观察到的表面非晶层厚度，表明此方法测量的表面氧化层厚度不受表面吸附层的影响，并且能直接了解UFP表面的具体氧化状态。The thickness of the surface oxide layer of Fe_(50_Pd_(50) alloy UFP was measured by XPS analysis associated with Ar+bombardment. The surface oxide layer thickness was found as approximately 1. 4nm,which is smaller than that of the surface amorphous layer observed by TEM. This method is not affected by the surface adsorbed substances and lead to an understanding of the surface state of UFP.

关 键 词：超微粒子 氧化层 粒子 测量 

分 类 号：O484.5[理学—固体物理]