射频CO_2激光器电源激励功率与频率关系的研究  

Study on the relationship between the power and the frequency of CO_2 laser excited by RF

作　　者：张德玲[1] 曹锋光[1] 韩晏生[1] 王又青[1] 

机构地区：[1]华中科技大学激光技术与工程研究院,武汉430074

出　　处：《激光技术》2005年第2期199-200,共2页Laser Technology

摘　　要：以气体放电理论为基础,利用简化模型推导出射频激励CO2 激光器气体放电击穿电压的数学关系式,指出影响激光气体放电击穿的几个物理参量。并通过实验测定了引起气体击穿时所需的注入功率与频率之间的关系。理论结果与相关试验测试结果符合一致。The mathematical relationship of breakdown voltage o f gas discharge in CO 2 laser excited by RF is derived by using reduced model bas ed on the theory of gas discharge and several physical parameters which influenc e gas discharge breakdown of laser are pointed out.By means of the experiment,t he relationship between the power infused and the frequency which cause the gas discharge breakdown is drawn.Compared the relative experimental test results wit h theoretical conclusion,both are consistent.

关 键 词：射频放电 电压特性 注入功率 频率 

分 类 号：TN248.22[电子电信—物理电子学]