用双频激光干涉仪实时修正阿贝误差的方法和实验  

Use Double Frequency Laser Interferometer to Make Real Time Correction of Abbe Error and Its Test

作　　者：谢广平[1] 成相印[1] 王泽民[1] 殷纯永[1] 

机构地区：[1]清华大学

出　　处：《制造技术与机床》1994年第10期8-10,共3页Manufacturing Technology & Machine Tool

摘　　要：讨论了对机床及某些测量仪器的阿贝误差进行实时修正的方法、原理和组成，同时介绍了验证该方法的实验装置及实测结果，在２．５ｍ的行程内，将最大１９．４μｍ的阿贝误差修正到１．３μｍ。It is discussed the real time correcting method, principle and constriction of Abbe error of machine tools and measuring instruments. It also introduced the testing device for verification of the method and the experimental result. By this .Way, the max.Abbe error of 19. 4μm is corrected to 1. 3μm.

关 键 词：实时修正 几何误差 违阿贝结构 

分 类 号：TG87[金属学及工艺—公差测量技术]