空气轴承  

出　　处：《机械工程通用零部件：英文版》2005年第2期37-40,共4页

摘　　要：ABS DESIGN AND FLY HEIGHT MODULATION OF FEMTO SLIDERS；Achievement of nanometric accuracy with stepper-driven machine；AFM/Optical metrology and application for head and disk；AIR-BEARING DESIGN BASED ON GLOBAL APPROXIMATION CONCEPTS；Air-bearing linear actuator for highly precise tracking；An active head slider using a piezoelectric cantilever for in situ flying-height control……

关 键 词：空气轴承 ABS设计 飞行高度修正 移动精度 

分 类 号：TH133.35[机械工程—机械制造及自动化]