四边型位置敏感探测器位置公式的改进  

Modification of Position Calculating Equations of Tetra-lateral Position Sensitive Detectors

作　　者：陶忠祥[1] 单纯玉[1] 宋建中[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所图像研究室

出　　处：《光子学报》2005年第4期507-510,共4页Acta Photonica Sinica

摘　　要：四边形位置敏感探测器(PSD)的传统位置计算公式不能正确反映实际光斑位置,存在严重的枕形失真,需要进行复杂的修正 基于Lucovsky方程的解析解,提出了改进型的PSD计算公式,结果表明,采用改进型公式可以使用少量数据完成对PSD的非线性修正,极大地提高PSD中央大部区域的线性度 对于1×1cm2 的PSD,在60%光敏面的区域内均方根误差小于3μm,非线性度小于0. 05%,该公式适用于所有的四边形PSD。For tetra-lateral position sensitive detectors (PSD) , the calculated positions obtained with the conventional equations of position calculation do not correspond to the real spot positions., and have serious pincushion distortion. A modified equation is proposed in terms of the analytical solutions of Lucovsky equation. According to the results, the correction of the PSD can be easily achieved and the linearity can also be greatly improved in most of the central active area by the modified equation. In the 60% of the active area of 1×1 cm2 PSD, the position root mean square (rms) error was less than 3 μm , the position non-linearity was less than 0.05%. This modified equation can be fit for all tetra-lateral PSDs.

关 键 词：位置敏感探测器 位置误差 线性度 修正 

分 类 号：TN15[电子电信—物理电子学]