Self-Consistent Model for Pulsed Direct-Current N_2 Glow Discharge  

作　　者：刘成森 王德真 

机构地区：[1]State Key Laboratory for Materials modification by Laser Ion and Electron Beams,Department of Physics,Dalian University of Technology,Dalian 116023,China Department of Physics,Liaoning Normal University,Dalian 116029,China [2]State Key Laboratory for Materials modification by Laser Ion and Electron Beams,Department of Physics,Dalian University of Technology,Dalian 116023,China

出　　处：《Plasma Science and Technology》2005年第2期2745-2747,共3页等离子体科学和技术（英文版）

基　　金：The project supported by the National Nature Science Foundation of China (No. 10275010)

摘　　要：A self-consistent analysis of a pulsed direct-current (DC) N2 glow discharge is presented. The model is based on a numerical solution of the continuity equations for electron and ions coupled with Poisson's equation. The spatial-temporal variations of ionic and electronic densities and electric field are obtained. The electric field structure exhibits all the characteristic regions of a typical glow discharge (the cathode fall, the negative glow, and the positive column). Current-voltage characteristics of the discharge can be obtained from the model. The calculated current-voltage results using a constant secondary electron emission coefficient for the gas pressure 133.32 Pa are in reasonable agreement with experiment.A self-consistent analysis of a pulsed direct-current (DC) N2 glow discharge is presented. The model is based on a numerical solution of the continuity equations for electron and ions coupled with Poisson's equation. The spatial-temporal variations of ionic and electronic densities and electric field are obtained. The electric field structure exhibits all the characteristic regions of a typical glow discharge (the cathode fall, the negative glow, and the positive column). Current-voltage characteristics of the discharge can be obtained from the model. The calculated current-voltage results using a constant secondary electron emission coefficient for the gas pressure 133.32 Pa are in reasonable agreement with experiment.

关 键 词：pulsed DC glow discharge plasma nitriding self-consistent model 

分 类 号：O461.21[理学—电子物理学]