反应等离子喷涂纳米TiN涂层的显微硬度及微观结构研究  

Hardness and microstructure of the nanocrystallined TiN coating by reactive plasma spray

作　　者：冯文然[1] 阎殿然[2] 何继宁[2] 陈光良[1] 顾伟超[1] 张谷令[1] 刘赤子[1] 杨思泽[1] 

机构地区：[1]中国科学院物理研究所,北京100080 [2]河北工业大学材料学院,天津300130

出　　处：《物理学报》2005年第5期2399-2402,共4页Acta Physica Sinica

基　　金：天津市自然基金 (批准号 :0 2 3 60 3 911) ;河北省自然基金 (批准号 :5 0 3 0 3 7)资助的课题 .~~

摘　　要：阐述了反应等离子喷涂 (RPS)方法的基本思想 .利用气体隧道等离子喷枪 ,通过RPS方法在Q2 35钢基底上成功制备了氮化钛涂层 .检测了TiN涂层在不同载荷下的显微硬度 ,结果显示TiN涂层具有明显的硬度压痕尺寸效应 ,在高载荷下加工硬化效应较弱 .XRD ,TEM及HRTEM等分析表明 ,通过RPS方法制备得到了纳米TiN涂层 ,涂层由直径约为 5 0— 70nm的TiN晶粒及非晶TiN所组成 .The basic idea of the reactive plasma spray (RPS) was presented. The TiN coating was successfully deposited on Q235 steel substrate by using the gas-tunnel plasma spray gun via RPS. Micro-hardness of the TiN coating under different loads has been measured, revealing an obvious indentation size effect, and a weak work-hardening effect. XRD, TEM and HRTEM were employed to analyze the prepared coating samples. Results obtained show that nanocrystalline TiN coating has been achieved via RPS, which is composed of TiN crystals of about 57-70 nm in diameter and the amorphous TiN.

关 键 词：反应等离子喷涂 纳米涂层 氮化钛 微观结构 显微硬度 

分 类 号：TB383[一般工业技术—材料科学与工程]