SiC电子输运特性的Monte Carlo数值模拟  

Monte Carlo Simulations of Electron Transport in Silicon Carbide

作　　者：王平[1] 杨银堂[1] 屈汉章[2] 杨燕[1] 李跃进[1] 贾护军[1] 

机构地区：[1]西安电子科技大学宽禁带半导体材料与器件教育部重点实验室,陕西西安710071 [2]西安邮电学院数理系,陕西西安710069

出　　处：《计算物理》2005年第3期245-250,共6页Chinese Journal of Computational Physics

基　　金：教育部重点资助(02074);国防科技预研基金(51408010601DZ1032)资助项目

摘　　要：　利用系综MonteCarlo法研究了2H ,4H 和6HSiC的电子输运特性.在模拟中考虑了对其输运过程有着重要影响的声学声子形变势散射、极化光学声子散射、谷间声子散射、电离杂质散射以及中性杂质散射.通过计算,获得了低场下这几种不同SiC多型电子迁移率同温度的关系,并以4H SiC为例,重点分析了中性杂质散射的影响.最后对高场下电子漂移速度的稳态和瞬态变化规律进行了研究.将模拟结果同已有的实验数据进行了比较,发现当阶跃电场强度为1 0×106V·cm-1时,4H Sic电子横向瞬态速度峰值接近3 3×107cm·s-1,6H Sic接近3 0×107cm·s-1.The electron transport properties in 2H-, 4H-, and 6H-SiC are investigated numerically with an ensemble Monte Carlo technique. The acoustic phonon deformation potential scattering, polar optical phonon scattering, intervalley phonon deformation scattering, ionized impurity scattering and neutral impurity scattering are considered. The electron mobilities of 2H-, 4H-, and 6H-SiC as a function of temperature at low electric field are obtained. The influence of the neutral impurity scattering on the transport property of 4H-SiC is discussed in detail. Finally, the static and transient variation of electron drift velocity in high electric fields are studied. The peak transient velocity in an electric field of 1.0×106 V·cm-1 is 3.3× l07 cm·s-1 for 4H-Sic and 3.0×107 cm·s-1 for 6H-Sic when the electric field is applied perpendicular to the c axis. The simulated results are in good agreement with recent experiments in a wide range of temperature and electric field.

关 键 词：电子输运特性 数值模拟 4H-SiC Carlo法 杂质散射 6H-Sic 声子散射 电子迁移率 声学声子 输运过程 实验数据 模拟结果 变化规律 漂移速度 电场强度 形变势 中性 瞬态 接近 系综 光学 电离 

分 类 号：O484.42[理学—固体物理] TN304.25[理学—物理]