激光扫描声学显微镜图像信号的分析与处理  

Analysis and Processing on the Image Signal of Scanning Laser Acoustic Microscope

作　　者：周鹰[1] 王亚非[1] 姜海明[1] 

机构地区：[1]电子科技大学光电信息学院,成都610054

出　　处：《仪器仪表学报》2005年第5期522-524,533,共4页Chinese Journal of Scientific Instrument

摘　　要：激光扫描声学显微镜(ScanningLaserAcousticMicroscope,简称SLAM)是声显微技术的一种形式。作为一种无损检测仪,它对于研究新材料和新器件的内部结构问题特别有用。由于声图像的成像机理与光像不同,随机噪声、衍射条纹和声斑干扰了对获得声图像的分析,因此在传统SLAM系统的基础上,讨论了利用获得的被测样品声学幅度信息,针对声波传播、声光互作用、光路及解调这四个过程对信号的影响进行研究,提出了对声学幅度信号进行相位补偿和线性滤波,采用计算机数值运算,以提高图像质量的方法。给出了利用该方法的实验结果。Scanning laser acoustic microscope (SLAM) is one type of acoustic microscopy. As a instrument for nondestructive, SLAM is very useful to study the internal structure of new materials and new devices. The theory of acoustic image is different from the theory of optic image, so the acoustic image is difficult to analysis and identification because of the interference generated by random noise, diffractive streak and acoustic speckle. Base on the conditional SLAM, it studied the theory of signal quality affected by acoustic wave propagating, acousto-optic interacting, optical path and demodulating. A method for enhancing acoustic image by using magnitude of signal for phase compensating and linear filtering and using computer digital processing is presented. Examples by using this method are provided.

关 键 词：激光扫描声学显微镜 分析与处理 图像信号 Laser 无损检测仪 声光互作用 显微技术 结构问题 成像机理 随机噪声 衍射条纹 SLAM 幅度信息 声波传播 线性滤波 相位补偿 数值运算 图像质量 声图像 新器件 新材料 计算机 

分 类 号：TH742.64[机械工程—光学工程] TP309.5[机械工程—仪器科学与技术]