50/100GHz AWG型光学梳状滤波器的设计与制备  

Design and Fabrication of 50/100GHz AWG Based Interleaver

作　　者：窦金锋[1] 韩培德[1] 胡雄伟[1] 

机构地区：[1]中国科学院半导体研究所光电子研究发展中心,北京100083

出　　处：《Journal of Semiconductors》2005年第5期1020-1023,共4页半导体学报（英文版）

基　　金：国家高技术研究发展计划资助项目(批准号:2001AA312130)~~

摘　　要：以Si基SiO2平面光波导为基础，设计并制备了50／100GHz AWG型光学梳状滤波器．制备得到的AWG型光学梳状滤波器可以覆盖1520～1585nm的波长范围，共有160个信道．功率输出不均匀度<0．5dB，插入损耗<8dB，相邻通道的串扰>13dB，在距离中心频率最远的信道，输出频率偏离ITU标准15GHz．分析了影响器件串扰和信道频率偏移的原因，并提出了相应的解决办法．GHz AWG based interleaver is designed and f abricated based on SiO 2-on-Si optical planar waveguides.It is capable of covering the wavelength ranging from 1520 to 1580nm with 160 channels.The loss nonuniformity is <0.5dB,the insertion loss <8dB,and the channel corsstalk to the neighbouring channels >13dB.The output frequency of the outer most channels has a deviation of 15GHz from the ITU grid.The reasons degrading the crosstalk property and channel-frequency accuracy of the device are analyzed,and the approaches improving the relevant properties are proposed.

关 键 词：AWG 光学梳状滤波器 平面光波导 Si基SiO2 

分 类 号：TN713[电子电信—电路与系统]