压电薄膜微致动器的制作和有限元分析  

Fabrication and FEM analysis of a piezoelectric thin-film microactuator

作　　者：荆阳[1] 雒建斌[1] 易晓星[2] 黄朋生[1] 

机构地区：[1]清华大学精密仪器与机械学系摩擦学国家重点实验室 [2]中国科学院声学研究所,北京100080

出　　处：《清华大学学报（自然科学版）》2005年第5期618-621,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(90206022)

摘　　要：为实现高密度硬盘驱动器磁头的精确定位,设计和制作了一种与不锈钢基体粘结的压电薄膜微致动器。该致动器中的锆钛酸铅多层膜元件采用溶胶凝胶技术制作而成。对该致动器进行了实验测试和有限元分析。结果表明:当采用双层膜结构时,压电微致动器的位移/驱动电压灵敏度和谐振频率分别达到了1.396μm/±20V和15.13kHz;有限元仿真结果与实测结果基本吻合。A piezoelectric thin-film microactuator bonded to a stainless steel suspension was fabricated for precise positioning of high-density hard disc drive magnetic heads. The piezoelectric microactuator was manufactured by applying a sol-gel technique to depositing lead-zirconate titanate (PZT) multilayer film elements. Tests and finite element analyses were made to evaluate the microactuator. The results show that with a PZT double-layer thin film microactuator, an applied voltage of ±20 V is sufficient to obtain a tip displacement of 1.396 μm with a high resonance frequency of 15.13 kHz. The simulation results agree well with the test results.

关 键 词：硬盘驱动器 压电微致动器 锆钛酸铅多层膜 双级伺服系统 

分 类 号：TP333.3[自动化与计算机技术—计算机系统结构]