弯曲型三明治结构FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜巨磁阻抗效应研究  

Giant magneto-impedance effect in sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB films with a meander line structure

作　　者：张亚民[1] 陈吉安[1] 丁文[1] 周勇[1] 王明军[1] 高孝裕[1] 周志敏[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院薄膜与微细技术教育部重点实验室,上海200030

出　　处：《功能材料》2005年第6期838-840,共3页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50275096);上海市纳米专项资助项目(0215nm104;0352nm014)

摘　　要：利用磁控溅射方法及微细加工技术制备了弯曲型三明治结构的FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜,在频率1～40MHz下研究了多层膜的纵向和横向巨磁阻抗效应,结果表明弯曲型三明治结构多层膜的巨磁阻抗效应高于它的传统的多层膜。在频率10MHz、磁场11.94kA/m下巨磁阻抗效应达-50%。Sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB multiplayer films with a meander line structure were prepared on silicon substrate by magnetron sputtering and microfabrication technology. The longitudinal and transverse magneto-impedance (GMI) effects were respectively studied in the frequency range of 1-40 MHz. Experimental results show the GMI effect was stronger in the sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB films with a meander line structure than in its traditional multiplayer films, and the maximum GMI effect with a value of -50% was obtained at 11.94kA/m for a frequency of 10 MHz.

关 键 词：巨磁阻抗 FeCuNbCrSiB/Cu/FeCuNbCrSiB 三明治薄膜 弯曲型结构 微细加工 

分 类 号：TM27[一般工业技术—材料科学与工程]