FeCuNbCrSiB/Cu/FeCuNbCrSiB薄膜各层宽度对其巨磁阻抗效应的影响  

Iinfluence of the Width of Each Layer on Giant Magneto-Impedance Effect in Sandwich FeCuNbCrSiB/Cu/ FeCuNbCrSiB Films

作　　者：张亚民[1] 陈吉安[1] 周勇[1] 丁文[1] 王明军[1] 高孝裕[1] 周志敏[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院

出　　处：《电子器件》2005年第2期254-257,共4页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(50275096);上海市纳米专项(0215nm104;0352nm014)资助

摘　　要：采用射频磁控溅射方法,利用微细加工工艺制备了不同薄膜宽度的三明治结构FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜,在频率1～40MHz下研究了薄膜宽度对多层膜的纵向和横向巨磁阻抗效应的影响。结果表明,三明治结构多层膜的巨磁阻抗效应随薄膜宽度的变化具有显著的影响,当FeCuNbCrSiB层、Cu层宽度分别取1.6mm、0.8mm时,GMI%达到最大值-21.22645%。Amorphous sandwiched FeCuNbCrSiB film were fabricated by sputtering method onto glass substrate, the giant magneto-impedance (GMI) effect has been investigated in sandwiched FeCuNbCrSiB/Cu/FeCuNbCrSiB films in the frequency range of 1~40 MHz. and compared GMI effect in varying width. The results show that the GMI effect is effected by the width of the film with magnetic field applied along the longitudinal and transverse direction, respectively. GMI effect reaches a maximum-21.226 45% when the width of FeCuNbCrSiB layer and Cu layer is 1.6 mm and 0.8 mm,respectively.

关 键 词：巨磁阻抗 FeCuNbCrSiB/Cu/FeCuNbCrSuB 三明治薄膜 微细加工 

分 类 号：TM27[一般工业技术—材料科学与工程]