喷涂热分解法制备掺锑SnO_2电热膜的工艺及电学性能的研究  

THE SPRAY PYROLYSIS METHOD FOR PROCESSING Sb-DOPEN SnO_2 ELECTRO-THERMAL FILM AND THE FILM′S ELECTRICAL PROPERTIES

作　　者：张瑞英[1] 张秀梅[1] 杨殿魁[1] 李志芳[1] 

机构地区：[1]内蒙古工业大学材料学院,呼和浩特010062

出　　处：《内蒙古工业大学学报（自然科学版）》2004年第3期205-208,共4页Journal of Inner Mongolia University of Technology：Natural Science Edition

基　　金：内蒙古工业大学校基金项目

摘　　要：本文研究了热喷涂分解法制备Sb:SnO2电热膜的工艺及基体对电热膜电学性能的影响,并讨论了该膜的电阻温度系数的变化.实验表明:喷涂工艺对掺Sb的SnO2电热膜的电学性能有很大影响.A study is made on the spray pyrolysis method for processing antimony-doped tin dioxide electron-thermal film,as well as the effect of the substrate on the electrical properties of the film.Besides,variation of the temperature coefficient of resistance is discussed.Experiments show that this processing method exerts a strong influence on the electrical properties of the antimony-doped tin dioxide electro-thermal film.

关 键 词：电热膜 简并半导体 电阻温度系数 

分 类 号：TB34[一般工业技术—材料科学与工程]