基于相位差法共焦式测头的研究  

A study on confocal probe based on phase difference measurement

作　　者：樊玉铭[1] 张国雄[1] 李智[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《工业计量》2005年第3期1-3,共3页Industrial Metrology

基　　金：国家自然科学基金资助项目; 项目号为: 50075064。

摘　　要：文章在研究了共焦法测量传感器及其测量系统的基础上, 提出了一种通过测量连续两个峰值信号的相位差来计算被测表面位置的方法。该测头采用振动音叉调整系统的焦点位置, 用参考臂光路提供参考信号。这种测头舍弃了微型位移传感器, 简化了系统结构, 降低了成本。测量范围为±0 1mm, 动态特性为336 点/s, 测量强反射表面允许的最大倾角为±12°。On the basis fo rearch on confocal measurement sensor and its measuring system, a method for calculating position of measured surface through use of phase difference measurement between two successive peak signals is presented. In the probe, tunning fork is used to modulate focal length, and reference signal is provided by reference optical path. Mini-transducer of displacement is given up in the probe,so system construction is simplified and cost is decreased. The measurement range ±0.1mm,dynamic simpling rate 336 points per second, and the maximum allowable inclination angle is ±12° when bright reflecting surface is measured.

关 键 词：共焦法 激光 非接触测量 

分 类 号：TH74[机械工程—光学工程]