压电驱动式双喷嘴挡板电液伺服阀  

Double-nozzle piezoelectric servovalve

作　　者：程光明[1] 李鹏[1] 杨志刚[1] 鄂世举[1] 刘建芳[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《光学精密工程》2005年第3期276-282,共7页Optics and Precision Engineering

基　　金：国家863计划资助项目(No.2001AA423270)。

摘　　要：设计了一种利用压电双晶片驱动器代替传统双喷嘴电液伺服阀力矩马达驱动部分的新型电液伺服阀,以期改善现有该型阀的动、静态特性。通过试验得出,设计的压电双晶片驱动器输出位移为82.5μm,全量程位移波动小于0.7μm,谐振频率1.2kHz,完全满足双喷嘴电液伺服阀对驱动器的要求。试验表明:基于此驱动器的电液伺服阀在频率低于100Hz的范围内具有良好的线性度,克服了传统双喷嘴电液伺服阀在频宽和抗电磁干扰能力等方面的不足。To improve the static and dynamic characteristics of traditional electrohydraulic servovalves, a new type electrohydraulic servovalve was designed by using piezoelectric actuator based on bimorph instead of the moment motor of conventional servovalves. The results show that the output distance of designed piezoelectric bimorph actuator is 82.5 μm, fluctuation in full scale is less than 0.7 μm, and resonance frequency is 1.2 kHz. It can meet the requests of servovalve. And the designed servovalve owns perfect linearity when the frequency is less than 100 Hz. The lacks of traditional electrohydraulic servovalves in bandwidth and anti-electromagnetic ability have been overcome.

关 键 词：电液伺服阀 压电双晶片 反馈控制 

分 类 号：TH703.6[机械工程—仪器科学与技术] TN384[机械工程—精密仪器及机械]