利用平面止推轴系研制高精度定心仪  

Development of a high precision eccentricity error measurement instrument with a thrust-shaft system

作　　者：杨李成[1] 凌宁[1] 

机构地区：[1]中国科学院光电技术研究所

出　　处：《光电工程》2005年第6期39-42,共4页Opto-Electronic Engineering

摘　　要：为了减小中心偏对光学仪器质量的影响,研制了一种利用平面止推轴系为基础的高精度定心仪。该定心仪测量精度:角晃动≤2″,转台主轴径向晃动≤1μm。利用该仪器对多组准直物镜进行了装调和中心偏测量,取得了较为满意的结果。在WYKO数字干涉仪上对装调好的准直物镜的光学性能进行了检测,测得波面误差的峰谷值(PV)为0.143λ,均方根误差为(1/50)λ,斯特列尔比(Strehl)已达到98%。检测结果表明,利用该仪器装调的准直物镜可以达到很高的精度。A high precision eccentric error measurement instrument with a thrust-shaft system is developed. This instrument is used to measure the eccentricity error of an optical system. The measurement results from the assembly of multiple groups of collimated objectives and the measurement of eccentricity say that the measuring accuracy of the centering instrument reaches: angular jitter [less-than or equal to] 2 double prime , principal axis radial jitter [less-than or equal to] 1 μm. The assembled collimation objective is inspected on a WYKO digital interferometer which proves that the lens reaches the specifications as PV 0.143λ, RMS λ/50, Strehl ratio 98%. The results show that the objective calibrated with the instrument is of high precision.

关 键 词：平面止推轴系 准直物镜 定心仪 检测 

分 类 号：TH133[机械工程—机械制造及自动化] TH703