MEASUREMENT OF 2-DIMENSIONAL DISPLACEMENT USING 2-D ZERO-REFERENCE MARKS  

作　　者：WangYingnan ZhouChenggang HuangWenhao 

机构地区：[1]DepartmentofPrecisionMachineryandInstrumentation,UniversityofScienceandTechnologyofChina,Hefei230026,China

出　　处：《Chinese Journal of Mechanical Engineering》2005年第2期314-316,共3页中国机械工程学报（英文版）

基　　金：This project is supported by National Natural Science Foundation of China(No.50335050, No.50275140)Specialized Research Foundation for Doctoral Program of Higher Education (SRFDP) of China(No. 20030358020).

摘　　要：Several 2-D displacement sensing methods are reviewed. As to the crossdiffraction grating, there is no absolute zero-reference. In regards to the optical fiber method,the output signal is affected greatly by the quality of the reflecting surface and it is hard to gethigh resolution. Considering the concentric-circle gratings, the displacement can only be gainedwith complicated calculating of the experiment data. Compared with the advantages and limitations ofthe methods above, a novel 2-D zero-reference mark is especially proposed and demonstrated. Thiskind of mark has an absolute zero-reference when used in pair, and the experimental result is simpleto dispose. By superimposing a pair of specially coded 2-D marks, the correct alignment position ofthe two marks can be detected by the maximum output of the sharp intensity peak. And each slope ofthe peak is of good linearity which can be used to achieve high resolution in positioning andalignment in two dimensions. Design and fabrication of such 2-D zero-reference marks are introducedin detail. The experiment results are agreed with the theoretical ones.Several 2-D displacement sensing methods are reviewed. As to the crossdiffraction grating, there is no absolute zero-reference. In regards to the optical fiber method,the output signal is affected greatly by the quality of the reflecting surface and it is hard to gethigh resolution. Considering the concentric-circle gratings, the displacement can only be gainedwith complicated calculating of the experiment data. Compared with the advantages and limitations ofthe methods above, a novel 2-D zero-reference mark is especially proposed and demonstrated. Thiskind of mark has an absolute zero-reference when used in pair, and the experimental result is simpleto dispose. By superimposing a pair of specially coded 2-D marks, the correct alignment position ofthe two marks can be detected by the maximum output of the sharp intensity peak. And each slope ofthe peak is of good linearity which can be used to achieve high resolution in positioning andalignment in two dimensions. Design and fabrication of such 2-D zero-reference marks are introducedin detail. The experiment results are agreed with the theoretical ones.

关 键 词：Cross diffraction grating Optical displacement sensor Concentric-circlegratings 2-D zero-reference marks Nano-positioning 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]