四步相移干涉测量的相位补偿及仿真  

Phase error compensation algorithm and simulationin four-step phase shifting interferometry

作　　者：王吉元[1] 田爱玲[1] 王红军[1] 

机构地区：[1]西安工业学院光电工程学院,西安710032

出　　处：《西安工业学院学报》2005年第1期23-27,共5页Journal of Xi'an Institute of Technology

基　　金：陕西省教育厅专项科研计划项目 (0 3JK1 70 )

摘　　要：　在应用相移技术进行相位测量时,相移器的相移误差直接影响相位的测量精度.将快速傅立叶变换技术和四步相移技术相结合,对相位进行补偿,并推出相位误差补偿公式.利用快速傅立叶变换技术求出实际相移量与理论值的相移误差εi,代入相位补偿公式计算相位.通过计算机仿真,采用四步相移算法、四步相移补偿算法得到了各个采样点的相位误差.分析可得,采用四步相移补偿算法比直接采用四步相移算法得到的相位误差有更高的精度,相位误差平均值提高10倍以上.In phase shifting technology,the phase shifting error from the phase shifter is the main factor that directly affects the measurement accuracy of the phase.In order to compensate the phase for improving measurement accuracy,FFT technology and four-step phase shifting interferometry are combinated,and compensation formula of the phase error is deduced in this paper.The actual phase shifting between two frames can be calculated by FFT,and then the phase shifting error between actual and theoretical one can be calculated.It is applied to the compensation formula to calculate the phase.Simulation and experiment are carried out to verify its effectiveness.The phase error of each sampling points is obtained with the four-step phase shifting algorithm and four-step phase shifting compensation algorithm.The results of analysis show that the compensation algorithm can improve the phase measurement accuracy compared with four-step algorithm,and the averge phase error can be reduced down 10 times more.

关 键 词：相移技术 相位误差补偿 相位测量 快速傅立叶变换 相位误差仿真 

分 类 号：O436.1[机械工程—光学工程]