红外液晶显示器透明导电膜的研制  

Development of IR Transparent Electroconductive Films for Liquid Crystal Light Valves(LCLV)

作　　者：赵恒谦[1] 徐晓峰[1] 董慧莲[1] 

机构地区：[1]哈尔滨工业大学

出　　处：《光电子技术》1994年第1期59-62,共4页Optoelectronic Technology

摘　　要：介绍了氧化铟掺铟红外透明导电膜的制备工艺,对影响其电学和光学的因素进行了分析,并探讨了红外透明导电的机理。以 BaF_2为基片的表面上制备了红外透明导电膜,对10.6 μm波长的透光率为56%,面电阻为730Ω/□。用该技术制备的样品作为红外透明电极,在红外液晶显示器中得到了应用。The deposition process of IR transparent electroconductive In_2O_3:In films has been explained with semiconductors physics theory.Films with sheet resistance of 730 Ω/□ and transmittance of 56% in 10.6μm have been deposited on BaF_2 substrate.The ef- fects of main process parameters on the optical and electrical Properties of films have been investigated.Such films have been used in the liquid crystal light valve(LCLV).

关 键 词：氧化铟 透明导电膜 液晶显示器 

分 类 号：TN141.9[电子电信—物理电子学]