ENERGY DISTRIBUTION OF BACKSCATTERED ELECTRONS FROM HEAVY METALS  

作　　者：K. Salma 

机构地区：[1]Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics, University of Science and Technology of China

出　　处：《Acta Metallurgica Sinica(English Letters)》2005年第3期345-350,共6页金属学报（英文版）

基　　金：This work was supported by the National Natural Science Foundation of China(No.10025420 and No.90206009).

摘　　要：The full energy distribution of backscattered electrons from the elastic peak do wn to the true-secondary electron peak for heavy metals, Ta, W, Pt and Au, in Au ger electron spectroscopy in the EN(E) mode has been studied with a Monte Carlo simulation method, which includes cascade-secondary-electron production. The sim ulation model is based on the use of a dielectric function for describing inelas tic scattering and secondary excitation, and on the use of Mott cross sections f or elastic scattering. A systematic comparison between the calculated and experi mental spectra measured with a cylindrical mirror analyzer has been made for pri mary energies ranging from 1 to 5keV. Excellent agreement was obtained for these heavy metals on the backscattering background at primary energies in the keV re gion. A significant contribution of cascade secondary electrons to the measured spectra on the low-energy side was found.The full energy distribution of backscattered electrons from the elastic peak do wn to the true-secondary electron peak for heavy metals, Ta, W, Pt and Au, in Au ger electron spectroscopy in the EN(E) mode has been studied with a Monte Carlo simulation method, which includes cascade-secondary-electron production. The sim ulation model is based on the use of a dielectric function for describing inelas tic scattering and secondary excitation, and on the use of Mott cross sections f or elastic scattering. A systematic comparison between the calculated and experi mental spectra measured with a cylindrical mirror analyzer has been made for pri mary energies ranging from 1 to 5keV. Excellent agreement was obtained for these heavy metals on the backscattering background at primary energies in the keV re gion. A significant contribution of cascade secondary electrons to the measured spectra on the low-energy side was found.

关 键 词：backscattered electrons Monte Carlo AES heavy metal 

分 类 号：TG115[金属学及工艺—物理冶金]