单轴硅微加速度传感器的原理与电路设计  

Principle and Circuitry Design of Single Axis Micromachined Silicon Accelerometer Sensor

作　　者：王文涛[1] 耿增建[1] 

机构地区：[1]西安微电子技术研究所,陕西西安710054

出　　处：《现代电子技术》2005年第14期92-94,共3页Modern Electronics Technique

摘　　要：单轴硅微加速度传感器将敏感部分与外围信号调理电路集成在一起,成为一个完整的加速度测量系统。系统除供电电源外不需要任何外加因素,能够实现电路的无触摸启动工作。敏感部分采用差动电容式结构具有高灵敏度、宽量程、较低的非线性误差、外围电路简单等优点。外围电路将敏感输出信号相位调制后,通过解调输出。解调电路采用开关电容(SC)的形式,通过负反馈系统反馈电荷影响采样-积分幅度的思路,设计电路对有效信息解调。本文介绍单轴硅微加速度计敏感部分的原理与外围调理电路的设计思路。Single axis micromachined silicon accelerometer sensor is a complete acceleration system combining the signal processing circuitry on the same chip.The system can work well requiring no external components except for standard power supply. The sensor element is made by the differential capacitor with the character of high sensitivity,big fullscale range,low nonlinearity, simple processing circuitry.We design circuitry to modulate the output signal of sensor element in phase and then demodulate it to get the acceleration information. The demodulator circuit is based on the idea of utilizing the feedback charge to impact the magnitude of sample and integral charge in a switchcapacitor way to demodulate the effective signal. This paper introduces the principle and the processing circuitry design of single axis micromachined silicon accelerometer sensor.

关 键 词：差动电容 电容电压转换 相位调制 开关电容解调 

分 类 号：TN4[电子电信—微电子学与固体电子学] TM93[电气工程—电力电子与电力传动]