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作 者:黄秋红[1] 邱宗明[1] 郭彦珍[1] 郭俊杰[1]
机构地区:[1]西安理工大学机械与精密仪器工程学院,陕西西安710048
出 处:《光电工程》2005年第7期52-54,63,共4页Opto-Electronic Engineering
摘 要:根据对编码水准标尺条纹图案的分布特征分析,并针对电子水准测量系统对标尺的精度要求,提出了一种多狭缝组合的光电显微镜瞄准检测标尺分划误差的方法。该方法中条纹图案由光学系统成像,并由前置多狭缝光阑的四象限光电池接收,光电池输出信号经处理后产生准确识别条纹中心的瞄准脉冲。该瞄准方法结合双频激光长度测量系统,可以实现编码标尺分划误差的动态检测,代替目前国内对编码水准标尺人工目视检测的过程。实验表明,该新型瞄准方法的瞄准精度优于2.0μm。The graphic features on code-bar grade rod are analyzed. In view of the precision requirement to grade-rod of an electronic leveling measurement system, a new method of collimating and measuring the stripe error of grade rod using photoelectric microscope with multi-slit diaphragm is presented. Stripe images are imaged through an optical system and received by four-quadrant photocell with multi-slit diaphragm. By processing the output signals of photocell electronically, collimation pulse to recognize the code-bar stripe center exactly is generated. In combination with double-frequency laser length measurement system, dynamic measurement of stripe error of code-bar invar grade rod can be performed automatically, which places present measurement process for code-bar grade rod by visual inspection. Experiment result shows that the accuracy of the new collimation system is better than 2.0 μm.
关 键 词:编码型水准标尺 激光干涉测量 动态瞄准 自动检测 多狭缝
分 类 号:TN247[电子电信—物理电子学]
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