微气体传感器的稳定性测试研究  

Investigation on Measurement of Micro Gas Sensor Stability

作　　者：魏广芬[1] 唐祯安[1] 陈正豪[2] 余隽[1] 王立鼎[1] 

机构地区：[1]大连理工大学,大连116024 [2]香港科技大学

出　　处：《中国机械工程》2005年第14期1247-1250,共4页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(59995550-5;90207003);国家863高技术研究发展计划资助项目(2003AA404180)

摘　　要：测试了一组微热板式气体传感器的稳定性,着重讨论了稳定性的几种描述方法,采用统计学方法对文献中常用于描述稳定性的几种特征参数进行了比较和取舍,引入了特征参数离散度来描述气体传感器的稳定性,并使用该方法比较了预加热时间对传感器稳定性的影响。The stability of a series of micro hotplate based gas sensors were investigated and the descriptive methods were discussed in focus. From the point of statistics, the general feature parameters to denote gas sensors' stability were compared and an optimal parameter set was extracted. The variation coefficient of parameters was adopted to describe the stability. By using this approach, the influences of preheating time on gas sensors' stability were investigated.

关 键 词：微气体传感器 稳定性 SNO2 特征参数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]